JPH0385463U - - Google Patents
Info
- Publication number
- JPH0385463U JPH0385463U JP14576089U JP14576089U JPH0385463U JP H0385463 U JPH0385463 U JP H0385463U JP 14576089 U JP14576089 U JP 14576089U JP 14576089 U JP14576089 U JP 14576089U JP H0385463 U JPH0385463 U JP H0385463U
- Authority
- JP
- Japan
- Prior art keywords
- target
- sputtering apparatus
- component sputtering
- cover
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576089U JPH0385463U (en]) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576089U JPH0385463U (en]) | 1989-12-18 | 1989-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385463U true JPH0385463U (en]) | 1991-08-29 |
Family
ID=31692383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14576089U Pending JPH0385463U (en]) | 1989-12-18 | 1989-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385463U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002371351A (ja) * | 2001-06-14 | 2002-12-26 | Hitachi Metals Ltd | 皮膜形成装置 |
-
1989
- 1989-12-18 JP JP14576089U patent/JPH0385463U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002371351A (ja) * | 2001-06-14 | 2002-12-26 | Hitachi Metals Ltd | 皮膜形成装置 |